SEMI Safety Evaluations

What is SEMI? A Guide to Semiconductor Equipment Standards

Semiconductor Equipment and Materials International or SEMI is the global industry association serving the manufacturing supply chain for the semiconductor industry. SEMI has developed a range of industry-specific standards and safety guidelines to promote best practice in semiconductor and flat panel manufacturing. Most foundries and fab operators require S2 reports be provided with new equipment.

SEMI S-Guidelines include:

• S2 – Environmental Health and Safety Guideline: Covers health, safety, and environmental standards for semiconductor manufacturing equipment.

• S8 – Ergonomics Engineering Guideline: Ensures equipment design supports operator safety and ergonomics.

• S10 – Risk Assessment and Evaluation Guideline: Provides a framework for evaluating risks associated with semiconductor manufacturing equipment.

• S14 – Fire Risk Assessment and Mitigation Guideline: Focuses on identifying and mitigating fire hazards in equipment design and operation.

• S22 – Electrical Design Safety Guideline: Sets standards for electrical safety and equipment design.

Does It Apply To Me?

Although voluntary, application of the S-Guidelines are seen by many companies within the Semiconductor industry as crucial to the buying process and will only purchase manufacturing equipment that complies with the applicable guidelines.

How Do I Comply With SEMI?

For equipment to comply with S-Guidelines it must be evaluated by an independent inspection body; Inspection Bodies must meet the requirements of S-Guideline S7 – Safety Guideline for Evaluating Personnel and Evaluating Company Qualifications.